- Integrated serial- and parallel-kinematic positioning solution with six axes of total motion
- All direct-drive axes with nanometer- and sub-microradian-level positioning resolution
- Rotary slip ring allows for electrical signal pass-thru of sample XY positioning stage
- Uncoupled dual z-axes allow simultaneous control of z and tilt motion of sample
- Example applications include sample manipulation and small-part inspection
Description
Specifications
Description
Description
Specifications