- 7-axis motion subsystem used for nanometer-level positioning of a sample for synchrotron beamline applications
- Continuous travel air-bearing rotary and 100 mm travel linear air-bearing stage provide precise sample scanning
- Small X, Y and Z stages on top of the rotary air bearing provide sample centering and alignment adjustments
- Screw-driven goniometer with six degrees of travel tilts the entire system
- Dual Z screw-driven stages with 50 mm travel position the air-bearing linear and rotary stages for coarse beamline alignment
- Laser interferometer provides near-workpoint feedback for improved linear air-bearing positioning accuracy
Description
Specifications
Description
Description
Specifications