- Planar XY air-bearing designed for low error motions with >125 kg payload capacity and up to 100 N of process forces
- Air-bearing direct-drive z-axis with pneumatic counterbalances designed for 60 kg payloads and up to 100 N of process forces
- Laser interferometer feedback system (not shown) to minimize work point motion error
- Sensors designed into machine frame and base structure for control feedback and move profile optimization
- Example applications include optics manufacturing and metrology
Description
Specifications
Description
Description
Specifications