ANT95R Serie Einachsige rotierende, direkt angetriebene Nanopositioniertische
ANT95R-Direktantriebsdrehtische bieten eine beispiellose Positionsstabilität und eine inkrementelle Bewegungsleistung unter 0,01 Bogensekunden und werden in zwei Genauigkeitsstufen angeboten. Die kompakte Größe ermöglicht eine einfache Integration mit anderen Bewegungsachsen und Systemen.
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Gestaltungsmerkmale
- 0,01 Bogensekunden Auflösung
- 0,005 Bogensekunden In-Position-Stabilität
- Hervorragende Bewegungsspezifikationen für Fehler
- Mehrachsige Konfigurationen
- Hohe dynamische Leistung
- Begrenzte und unbegrenzte Rotation
Multi-Achsen-Fähigkeiten
Die ANT95R-Serie ist auf Kompatibilität und einfache Integration mit den ANT-Lineartischen von Aerotech ausgelegt. Zusammen bieten diese Tische Genauigkeit, Stabilität und kleine Leistungsmerkmale für nahezu jede Anwendung in der Nanotechnologie oder Inspektion.
Dynamische Leistung
Zusätzlich zu den hohen Präzisionswerten bieten diese Systeme eine hohe dynamische Leistung und einen hohen Durchsatz, ideal für Prozesse, die Geschwindigkeit und Präzision erfordern.
Haltbarkeit
Die ANT95R-Tischserie wurde für den Betrieb in einer 24/7-Fertigungsumgebung entwickelt. Im Gegensatz zu anderen rotierenden Geräten benötigt der ANT95-R keine periodische Wartung, was einen jahrelangen, störungsfreien Betrieb gewährleistet.
ANT95R Specifications
ANT95R-020 | ANT95R-180 | ANT95R-360 | |
Rotation Angle | 20° | 180° | ±360° Continuous |
Accuracy-Base(1) | 10 arc sec | ||
Accuracy-PLUS(1) | 3 arc sec | ||
Resolution (Minimum Incremental Motion) | 0.01 arc sec | ||
Bidirectional Repeatability(1) | 1.5 arc sec | ||
Unidirectional Repeatability | 0.5 arc sec | ||
Tilt Error Motion-Synchronous | N/A | 10 arc sec | |
Tilt Error Motion-Asynchronous | N/A | 3 arc sec | |
Axial Error Motion-Synchronous | N/A | 2 µm | |
Axial Error Motion-Asynchronous | N/A | 0.5 µm | |
Radial Error Motion-Synchronous | N/A | 3 µm | |
Radial Error Motion-Asynchronous | N/A | 1 µm | |
Maximum Speed | 20 rpm | 200 rpm | |
Maximum Acceleration | 400 rad/s2 | ||
In-Position Stability(2) | 0.005 arc sec | ||
Aperture | 11 mm | ||
Maximum Torque (Continuous) | 0.2 N-m | ||
Load Capacity-Axial(3) | 2.0 kg | ||
Load Capacity-Radial(3) | 1.5 kg | ||
Load Capacity-Moment(3) | 2 N-m | ||
Rotor Inertia (Unloaded) | 0.00065 kg-m2 | 0.00066 kg-m2 | 0.00069 kg-m2 |
Stage Mass | 1.2 kg | ||
Material | Aluminum Body/Black Hardcoat Finish | ||
MTBF (Mean Time Between Failure) | 30,000 Hours |
- Certified with each stage. Requires the use of an Aerotech controller.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- All error motion specifications are measured at 60 rpm.
- For high-speed operation customer payload must be balanced to G1.0 per ISO 1940.
- To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours.
ANT95R Electrical Specifications
ANT95R-020 | ANT95R-180 | ANT95R-360 | |
Drive System | Slotless, Brushless, Direct-Drive Rotary Motor | ||
Feedback | Noncontact Rotary Encoder | ||
Maximum Bus Voltage | ±40 VDC | ||
Limit Switches | 5 V, Normally Closed | ||
Home Switch | Near Center |
Ordering Information
Travel (Required)
Option | Description |
-360 | Continuous travel |
-20 | Limited travel, ±10 degrees |
-180 | Limited travel, ±90 degrees |
Mounting Plate (Optional)
Option | Description |
-MP | Mounting plate |
Performance Grade (Required)
Option | Description |
-PL1 | Base performance |
-PL2 | High-accuracy performance, PLUS |
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
Option | Description |
-TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
-TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |