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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Gestaltungsmerkmale

  • 0,01 Bogensekunden Auflösung
  • 0,005 Bogensekunden In-Position-Stabilität
  • Hervorragende Bewegungsspezifikationen für Fehler
  • Mehrachsige Konfigurationen
  • Hohe dynamische Leistung
  • Begrenzte und unbegrenzte Rotation

Multi-Achsen-Fähigkeiten

Die ANT95R-Serie ist auf Kompatibilität und einfache Integration mit den ANT-Lineartischen von Aerotech ausgelegt. Zusammen bieten diese Tische Genauigkeit, Stabilität und kleine Leistungsmerkmale für nahezu jede Anwendung in der Nanotechnologie oder Inspektion.

Dynamische Leistung

Zusätzlich zu den hohen Präzisionswerten bieten diese Systeme eine hohe dynamische Leistung und einen hohen Durchsatz, ideal für Prozesse, die Geschwindigkeit und Präzision erfordern.

Haltbarkeit

Die ANT95R-Tischserie wurde für den Betrieb in einer 24/7-Fertigungsumgebung entwickelt. Im Gegensatz zu anderen rotierenden Geräten benötigt der ANT95-R keine periodische Wartung, was einen jahrelangen, störungsfreien Betrieb gewährleistet.

ANT95R Specifications

ANT95R-020

ANT95R-180

ANT95R-360

Rotation Angle

20°

180°

±360° Continuous

Accuracy-Base(1)

10 arc sec

Accuracy-PLUS(1)

3 arc sec

Resolution (Minimum Incremental Motion)

0.01 arc sec

Bidirectional Repeatability(1)

1.5 arc sec

Unidirectional Repeatability

0.5 arc sec

Tilt Error Motion-Synchronous

N/A

10 arc sec

Tilt Error Motion-Asynchronous

N/A

3 arc sec

Axial Error Motion-Synchronous

N/A

2 µm

Axial Error Motion-Asynchronous

N/A

0.5 µm

Radial Error Motion-Synchronous

N/A

3 µm

Radial Error Motion-Asynchronous

N/A

1 µm

Maximum Speed

20 rpm

200 rpm

Maximum Acceleration

400 rad/s2

In-Position Stability(2)

0.005 arc sec

Aperture

11 mm

Maximum Torque (Continuous)

0.2 N-m

Load Capacity-Axial(3)

2.0 kg

Load Capacity-Radial(3)

1.5 kg

Load Capacity-Moment(3)

2 N-m

Rotor Inertia (Unloaded)

0.00065 kg-m2

0.00066 kg-m2

0.00069 kg-m2

Stage Mass

1.2 kg

Material

Aluminum Body/Black Hardcoat Finish

MTBF (Mean Time Between Failure)

30,000 Hours

Notes:
  1. Certified with each stage. Requires the use of an Aerotech controller.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  4. Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
  5. All error motion specifications are measured at 60 rpm.
  6. For high-speed operation customer payload must be balanced to G1.0 per ISO 1940.
  7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours.

ANT95R Electrical Specifications

ANT95R-020

ANT95R-180

ANT95R-360

Drive System

Slotless, Brushless, Direct-Drive Rotary Motor

Feedback

Noncontact Rotary Encoder

Maximum Bus Voltage

±40 VDC

Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Dimensions

ANT95R



Ordering Information

Travel (Required)

Option Description
-360Continuous travel
-20Limited travel, ±10 degrees
-180Limited travel, ±90 degrees

Mounting Plate (Optional)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1Base performance
-PL2High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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